High sensitivity optical position sensitive detectors fabricated from high resistivity substrates
Identifieur interne : 008C94 ( Main/Exploration ); précédent : 008C93; suivant : 008C95High sensitivity optical position sensitive detectors fabricated from high resistivity substrates
Auteurs : J. Henry [Australie] ; J. Livingstone [Australie]Source :
- Proceedings of SPIE - The International Society for Optical Engineering [ 0277-786X ] ; 2008.
Descripteurs français
- Pascal (Inist)
English descriptors
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Abstract
Position sensitive detectors (PSDs) comprise optical sensors used in applications such as robotic vision, machine tool alignment and other precision measurements. This paper will report on a series of Schottky Barrier crystalline silicon devices which display marked advantages including rapid response times, easier fabrication techniques and high sensitivities compared with most other research work now being concentrated on PECVD amorphous silicon structures. In this work, results from devices fabricated from substrates with a range of resistivities and various Schottky metals are presented. Some of the sensitivity measurements obtained are better than 25 mV/mm which are some of the best sensitivities reported for Schottky barrier crystalline PSDs. These results were obtained coincidentally with excellent linearities. Devices were also tested under a range of light beams including very low broadband white light levels of 0.1 mW up to 10mW. The highest and most linear outputs occurred under different conditions for each substrate resistivity and Schottky metal. Also observed were the different effects that background illumination had on each set of devices, the biggest effect being on the highest resistivity devices.
Affiliations:
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Livingstone</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>School of Electrical Electronic and Computer Engineering The University of Western Australia 35 Stirling Highway</s1><s2>Crawley, 6009, Western Australia</s2><s3>AUS</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>School of Electrical Electronic and Computer Engineering The University of Western Australia 35 Stirling Highway</wicri:noRegion></affiliation></author></titleStmt><publicationStmt><idno type="wicri:source">INIST</idno><idno type="inist">08-0527902</idno><date when="2008">2008</date><idno type="stanalyst">PASCAL 08-0527902 INIST</idno><idno type="RBID">Pascal:08-0527902</idno><idno type="wicri:Area/PascalFrancis/Corpus">003188</idno><idno type="wicri:Area/PascalFrancis/Curation">002E65</idno><idno type="wicri:Area/PascalFrancis/Checkpoint">003190</idno><idno type="wicri:explorRef" wicri:stream="PascalFrancis" wicri:step="Checkpoint">003190</idno><idno type="wicri:doubleKey">0277-786X:2008:Henry J:high:sensitivity:optical</idno><idno type="wicri:Area/Main/Merge">009604</idno><idno type="wicri:Area/Main/Curation">008C94</idno><idno type="wicri:Area/Main/Exploration">008C94</idno></publicationStmt><sourceDesc><biblStruct><analytic><title xml:lang="en" level="a">High sensitivity optical position sensitive detectors fabricated from high resistivity substrates</title><author><name sortKey="Henry, J" sort="Henry, J" uniqKey="Henry J" first="J." last="Henry">J. Henry</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>School of Electrical Electronic and Computer Engineering The University of Western Australia 35 Stirling Highway</s1><s2>Crawley, 6009, Western Australia</s2><s3>AUS</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>School of Electrical Electronic and Computer Engineering The University of Western Australia 35 Stirling Highway</wicri:noRegion></affiliation></author><author><name sortKey="Livingstone, J" sort="Livingstone, J" uniqKey="Livingstone J" first="J." last="Livingstone">J. Livingstone</name><affiliation wicri:level="1"><inist:fA14 i1="01"><s1>School of Electrical Electronic and Computer Engineering The University of Western Australia 35 Stirling Highway</s1><s2>Crawley, 6009, Western Australia</s2><s3>AUS</s3><sZ>1 aut.</sZ><sZ>2 aut.</sZ></inist:fA14><country>Australie</country><wicri:noRegion>School of Electrical Electronic and Computer Engineering The University of Western Australia 35 Stirling Highway</wicri:noRegion></affiliation></author></analytic><series><title level="j" type="main">Proceedings of SPIE - The International Society for Optical Engineering</title><idno type="ISSN">0277-786X</idno><imprint><date when="2008">2008</date></imprint></series></biblStruct></sourceDesc><seriesStmt><title level="j" type="main">Proceedings of SPIE - The International Society for Optical Engineering</title><idno type="ISSN">0277-786X</idno></seriesStmt></fileDesc><profileDesc><textClass><keywords scheme="KwdEn" xml:lang="en"><term>Experimental study</term><term>Manufacturing processes</term><term>Measuring methods</term><term>Optical beam</term><term>Optical sensors</term><term>Position sensitive detectors</term><term>Vision</term><term>White light</term></keywords><keywords scheme="Pascal" xml:lang="fr"><term>Vision</term><term>Détecteur positionnement</term><term>Capteur optique</term><term>Etude expérimentale</term><term>Procédé fabrication</term><term>Faisceau optique</term><term>Lumière blanche</term><term>Méthode mesure</term><term>0130C</term><term>0707D</term></keywords></textClass></profileDesc></teiHeader><front><div type="abstract" xml:lang="en">Position sensitive detectors (PSDs) comprise optical sensors used in applications such as robotic vision, machine tool alignment and other precision measurements. This paper will report on a series of Schottky Barrier crystalline silicon devices which display marked advantages including rapid response times, easier fabrication techniques and high sensitivities compared with most other research work now being concentrated on PECVD amorphous silicon structures. In this work, results from devices fabricated from substrates with a range of resistivities and various Schottky metals are presented. Some of the sensitivity measurements obtained are better than 25 mV/mm which are some of the best sensitivities reported for Schottky barrier crystalline PSDs. These results were obtained coincidentally with excellent linearities. Devices were also tested under a range of light beams including very low broadband white light levels of 0.1 mW up to 10mW. The highest and most linear outputs occurred under different conditions for each substrate resistivity and Schottky metal. Also observed were the different effects that background illumination had on each set of devices, the biggest effect being on the highest resistivity devices.</div></front></TEI><affiliations><list><country><li>Australie</li></country></list><tree><country name="Australie"><noRegion><name sortKey="Henry, J" sort="Henry, J" uniqKey="Henry J" first="J." last="Henry">J. Henry</name></noRegion><name sortKey="Livingstone, J" sort="Livingstone, J" uniqKey="Livingstone J" first="J." last="Livingstone">J. Livingstone</name></country></tree></affiliations></record>Pour manipuler ce document sous Unix (Dilib)
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